 極精緻的設計及很好的使用功能可具有 |
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| 高信賴度及精確之位移控制 |
| 超高解析度,可達奈米及次奈米之精度 |
| 位移量可達100um |
| 可附加應力規及電容式量測感應系統,精 |
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| 可應用於光學/雷射調校/光纖定位/微加 |
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| 產品系列PA/PX/PXY/TRITOR/PENTOR/ |
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.PHL/PAHL/PZ/PU/RA/nanoX etc |
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| Very compact design and excellent performance |
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with 3D motion capability. |
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| High reliability and accurate motion control. |
| High resolution in nm and sub-nm range. |
As an option, an integrated strain gauge and
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capacitive measurement system is available. |
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| Can use to optics/laser tuning/fiber |
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positioning/micromanipulation/microscopy |
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/scanning system/vacuum and low temperature |
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application |
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| Products series PA/PX/PXY/TRITOR/PENTOR/ |
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PHL/PAHL/PZ/PU/RA/nanoX etc |
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